Ua ke nrog kev ua tau zoo ntawm cov khoom siv Al2O3 thiab BeO substrate, Aluminium Nitride (AlN) ceramic, uas muaj thermal conductivity (monocrystal theoretical thermal conductivity yog 275W / m▪k, polycrystal's theoretical thermal conductivity yog 70 ~ 210W / m▪k ), tsis tshua muaj dielectric tsis tu ncua, thermal expansion coefficient txuam nrog ib leeg siv lead ua silicon, thiab cov khoom siv hluav taws xob zoo, yog cov khoom siv zoo tshaj plaws rau cov khoom siv hluav taws xob thiab cov ntim hauv kev lag luam microelectronics.Nws tseem yog ib qho tseem ceeb ntawm cov khoom siv kub kub ntawm cov khoom siv ceramic vim qhov kub siab zoo txhua yam khoom, thermal zog thiab tshuaj stability.
Lub theoretical ceev ntawm AlN yog 3.26g / cm3, MOHS hardness yog 7-8, chav-kub resistivity yog ntau tshaj 1016Ωm, thiab thermal expansivity yog 3.5 × 10-6 / ℃ (chav kub ntawm 200 ℃).Ntshiab AlN ceramics tsis muaj xim thiab pob tshab, tab sis lawv yuav muaj ntau yam xim xws li grey, greyish dawb lossis lub teeb daj, vim yog impurities.
Ntxiv nrog rau cov thermal conductivity, AlN ceramics kuj muaj qhov zoo hauv qab no:
1. Muaj hluav taws xob zoo;
2. Zoo sib xws thermal expansion coefficient nrog silicon monocrystal, superior rau cov ntaub ntawv xws li Al2O3 thiab BeO;
3. Lub zog txhua yam thiab zoo sib xws flexural zog nrog Al2O3 ceramics;
4. Nruab nrab dielectric tas li thiab dielectric poob;
5. Piv nrog BeO, cov thermal conductivity ntawm AlN ceramics tsis tshua muaj kev cuam tshuam los ntawm qhov kub thiab txias, tshwj xeeb tshaj yog siab tshaj 200 ℃;
6. Kub kub kuj thiab corrosion kuj;
7. Tsis muaj tshuaj lom;
8. Siv rau kev lag luam semiconductor, chemical metallurgy kev lag luam thiab lwm yam kev lag luam.
Post lub sij hawm: Lub Xya hli ntuj-14-2023