Ua ke nrog cov txiaj ntsig zoo ntawm cov khoom siv Al2O3 thiab BeO substrate ib txwm muaj, Aluminium Nitride (AlN) ceramic, uas muaj cov thermal conductivity siab (monocrystal's theoretical thermal conductivity yog 275W / m▪k, polycrystal's theoretical thermal conductivity yog 70 ~ 210W / m▪k), dielectric tsis tu ncua qis, thermal expansion coefficient phim nrog ib leeg siv lead ua silicon, thiab cov khoom hluav taws xob rwb thaiv tsev zoo, yog cov khoom zoo tagnrho rau cov khoom siv hluav taws xob thiab ntim khoom hauv kev lag luam microelectronics. Nws tseem yog cov khoom siv tseem ceeb rau cov khoom siv ceramic kub siab vim muaj cov khoom siv kho tshuab kub siab, cov khoom siv thermal thiab kev ruaj khov tshuaj lom neeg.
Qhov ceev theoretical ntawm AlN yog 3.26g / cm3, MOHS hardness yog 7-8, chav tsev kub resistivity yog ntau dua 1016Ωm, thiab thermal expansivity yog 3.5 × 10-6 / ℃ (chav tsev kub ntawm 200 ℃). Cov AlN ceramics ntshiab tsis muaj xim thiab pob tshab, tab sis lawv yuav muaj ntau yam xim xws li grey, greyish dawb lossis daj daj, vim yog cov impurities.
Ntxiv rau qhov muaj peev xwm ua kom sov tau zoo, AlN ceramics kuj muaj cov txiaj ntsig zoo li nram no:
1. Kev rwb thaiv hluav taws xob zoo;
2. Cov coefficient thermal expansion zoo sib xws nrog silicon monocrystal, zoo dua li cov ntaub ntawv zoo li Al2O3 thiab BeO;
3. Lub zog kho tshuab siab thiab lub zog flexural zoo sib xws nrog Al2O3 ceramics;
4. Nruab nrab dielectric tas mus li thiab dielectric poob;
5. Piv nrog BeO, qhov thermal conductivity ntawm AlN ceramics tsis tshua cuam tshuam los ntawm qhov kub thiab txias, tshwj xeeb tshaj yog saum 200 ℃;
6. Kev kub siab ua haujlwm thiab kev tiv thaiv corrosion;
7. Tsis muaj tshuaj lom;
8. Siv rau kev lag luam semiconductor, kev lag luam tshuaj lom neeg thiab lwm yam kev lag luam.
Lub sijhawm tshaj tawm: Lub Xya Hli-14-2023