Teflon Coated Ceramic End Effector - Qhov Chaw Tsis Nplaum Rau Kev Tuav Wafer Rhiab
St.Cera's Teflon (PTFE) coated ceramic end effector sib xyaw ua ke lub zog siab alumina substrate nrog lub zog sib xws, qis-friction PTFE txheej (tuab 15–30 μm). Lub txheej muab cov coefficient qis heev ntawm kev sib txhuam (≤0.1), zoo heev tshuaj lom neeg tsis kam, thiab cov khoom tsis lo, tiv thaiv wafer lo thiab tshem tawm cov khoom paug rov qab. Lub hauv paus ceramic substrate (99.8% Al₂O₃) muaj lub zog flexural siab (361–1000 MPa), hnav tsis kam, thiab thermal stability txog li 260 ° C (txheej txheem txheej). Lub end effector no zoo tagnrho rau kev tuav cov wafers mos, nyias, lossis nplaum (piv txwv li, tom qab photoresist txheej lossis cov txheej txheem tshuaj lom neeg).
Cov Lus Qhia Tshwj Xeeb (raws li 99.8% Al₂O₃ substrate nrog PTFE txheej):
| Vaj tse | Tus nqi |
| Cov Khoom Siv Hauv Qab | 99.8% Alumina (Ivory) |
| Cov Khoom Siv Txheej | PTFE (Teflon) |
| Txheej Thickness | 15–30 μm |
| Coefficient ntawm Kev Sib Txhuam (Txheej) | ≤0.1 |
| Lub Zog Flexural ntawm Cov Khoom Siv (Al₂O₃) | 361 MPa |
| Qhov nyuaj ntawm cov khoom siv (Al₂O₃) | 16 GPa |
| Qhov Ceev ntawm Cov Khoom Siv | 3.93 g/cm³ |
| Max Operating Temp (txheej txheem txheej) | 260°C |
| Qhov Roughness ntawm qhov chaw (ua ntej txheej) | Ra ≤0.4 μm |
| Lub zog dielectric (substrate) | 15 × 10⁶ V/m |
Lus Cim: PTFE txheej txwv qhov kub siab tshaj plaws rau 260 ° C; rau cov ntawv thov kub dua, xav txog cov khoom siv ceramic tsis muaj txheej lossis lwm yam txheej.
Cov ntawv thov:
- · Kev tuav cov wafers tom qab photoresist txheej (cov nto nplaum)
- · Kev hloov cov wafers nyias lossis tawg yooj yim (tiv thaiv kom tsis txhob lo)
- · Cov cuab yeej tshuaj xyuas thiab ntsuas semiconductor
- · Kev siv tshuab hauv chav huv uas yuav tsum txo qhov kev ua qias tuaj ntawm cov khoom me me
Txheej Txheem Tsim Khoom:
Cov khoom siv ceramic sintered thiab precision grounding → surface roughening (plasma etch lossis grit blast) → PTFE spray coating → heat curing ntawm 380 ° C → kev tshuaj xyuas zaum kawg. Txhua qhov kawg effector raug kuaj xyuas rau qhov tuab ntawm txheej (eddy current), adhesion (cross-cut test ASTM D3359), thiab coefficient of friction.
Kev Tswj Xyuas Zoo:
Kev tshuaj xyuas pom 100% rau cov qhov lossis cov npuas; qhov tuab ntawm txheej sib xws hauv ± 5 μm; tsis muaj kev tawg tom qab 90 ° khoov sim ntawm daim coupon pov thawj. Kev kuaj xyuas qhov ntev raws li OEM kam rau siab (ntev ± 0.05 hli, qhov tiaj tiaj ≤0.1 hli).
Cov txiaj ntsig zoo dua li Cov Khoom Uas Tsis Muaj Txheej lossis Lwm Cov Txheej Txheem:
- · Qhov chaw tsis lo rau tiv thaiv wafer lo thiab tawg
- · Cov coefficient qis tshaj plaws ntawm kev sib txhuam ntawm cov txheej txheem ceramic
- · Tiv thaiv tshuaj lom neeg zoo heev (acids, bases, solvents)
- Txo cov khoom me me los ntawm kev tiv thaiv kev hloov pauv khoom
Cov kev txwv (lus hais txog kev hloov pauv ntawm cov khoom siv):
Cov txheej PTFE tsis yog los ntawm cov lus qhia txog cov khoom siv (Al₂O₃, ZrO₂, Si₃N₄, BeO). Cov khoom siv substrate ua raws li cov ntaub ntawv muab los (99.8% Al₂O₃). Cov khoom siv txheej yog raws li cov qauv PTFE hauv kev lag luam, vim tsis muaj cov ntaub ntawv txheej tau muab. Rau cov ntawv thov tshaj 260 ° C, pom zoo kom siv cov khoom siv ceramic tsis muaj txheej.*
Kev Kho Kom Haum:
Muaj qhov ntev li ntawm 150–1500 hli, cov duab ntawm lub hau (qhov tuav ntawm ntug, Bernoulli, tiaj tus), cov qauv flange mounting raws li OEM daim duab. Kev txheej ib nrab (tsuas yog thaj chaw sib cuag) lossis kev npog tag nrho xaiv tau.
Thov ib qho qauv rau kev sim kev nplaum thiab kev sib txhuam.
