Alumina Ceramic End Effector nrog Integrated Vacuum Channels
Lub tshuab nqus tsev alumina ntawm St.Cera muab cov kav dej nqus tsev uas raug tshuab ua kom raug thiab cov qhov nqus tsev ncaj qha rau hauv lub cev alumina uas muaj 99.8% huv si. Tus qauv tsim no tshem tawm cov ntaub nqus tsev sab nraud, ua rau cov wafer khaws tau ncaj qha nrog lub zog tuav sib npaug. Lub zog khoov siab ntawm cov khoom siv (361 MPa) thiab qhov nyuaj (16 GPa) ua kom muaj kev ruaj khov ntev hauv qab lub voj voog nqus tsev rov ua dua. Kev tiaj tiaj thoob plaws thaj chaw pad tau tswj hwm hauv 10 μm, tiv thaiv kev ntxhov siab thiab kev tawg ntawm wafer. Cov chaw nqus tsev nyob ntawm lub flange mounting tom qab kom yooj yim koom ua ke nrog OEM robot caj npab.
Cov Lus Qhia Tshwj Xeeb(raws li 99.8% Al₂O₃):
| Vaj tse | Tus nqi |
| Khoom siv | 99.8% Alumina (Ivory) |
| Qhov Ceev | 3.93 g/cm³ |
| Lub zog flexural | 361 MPa |
| Vickers Hardness | 16 GPa |
| Young's Modulus | 380 GPa |
| Kev nthuav dav thermal | 7.2 × 10⁻⁶/℃ |
| Qhov tiaj tiaj ntawm ncoo | ≤10 μm |
| Qhov Dav ntawm Lub Tshuab Nqus Tsev | 0.5–2.0 hli |
| Max Kev Ua Haujlwm Temp | 800°C |
Cov ntawv thov:
● Siv lub tshuab nqus tsev los nqus cov wafers nyias los yog nkhaus
● Kev tuav wafer ncaj qha yam tsis muaj kev tuav ntug
● Kev hloov pauv ntawm lub cell hnub ci thiab LED substrate
Kev Tsim Khoom:
Sintered alumina dawb paug → 5-axis CNC drilling ntawm cov channel nqus tsev thiab qhov → lapping nto → ultrasonic ntxuav → helium xau kuaj. Txhua lub effector yog 100% flow-tested rau lub tshuab nqus tsev sib xws.
Cov txiaj ntsig:
● Tsis muaj cov ntaub nqus tsev sab nraud (txo cov khoom me me)
● Kev tuav lub zog sib npaug tiv thaiv kev cim wafer
● Tsis muaj tshuaj lom neeg thiab tsis sib haum nrog chav huv
