ESD-Safe Alumina Ceramic Parts rau Static-Relative Wafer Handling
Cov khoom siv alumina ceramic uas muaj ESD (electrostatic discharge) yog tsim los ntawm 99.8% purity Al₂O₃ nrog rau qhov resistivity ntawm 10⁶–10⁹ Ω/sq, ua tiav los ntawm kev siv cov txheej txheem doping lossis txheej txheem. Cov khoom no ua kom cov nqi hluav taws xob ploj mus zoo, tiv thaiv kev puas tsuaj electrostatic rau cov wafers thiab cov khoom siv semiconductor rhiab heev. Cov khoom siv hauv paus tseem khaws nws lub zog flexural siab (361 MPa), hardness (16 GPa), thiab dielectric zog (15 × 10⁶ V/m). Cov khoom siv ceramic uas muaj ESD muaj xws li cov khoom siv kawg, cov pins nqa, cov rails qhia, thiab cov khoom siv kho kom haum rau FAB automation.
Cov Lus Qhia Tshwj Xeeb(raws li 99.8% Al₂O₃ nrog kev kho ESD):
| Vaj tse | Tus nqi |
| Cov Khoom Siv Tseem Ceeb | 99.8% Alumina |
| Kev Tiv Thaiv Nto (ESD) | 10⁶–10⁹ Ω/sq |
| Qhov Ceev | 3.93 g/cm³ |
| Lub zog flexural | 361 MPa |
| Vickers Hardness | 16 GPa |
| Young's Modulus | 380 GPa |
| Kev Nthuav Dav Kub (25-1000 ° C) | 7.2 × 10⁻⁶/℃ |
| Max Kev Ua Haujlwm Temp | 800°C |
| Lub zog dielectric (ntau) | 15 × 10⁶ V/m |
Lus Cim: ESD qhov tsis kam tiv taus ntawm qhov chaw tsis tau muab tso rau hauv cov lus qhia txog cov khoom siv uas tau muab los. Qhov ntau thiab tsawg saum toj no yog tus qauv kev lag luam rau cov khoom siv dissipative ceramics. Thov hu rau peb kom tau txais cov ntawv qhia txog kev xeem.
Cov ntawv thov:
● Cov khoom siv tiv thaiv ESD rau kev hloov pauv wafer
● Cov pins av thiab cov khoom siv ESD hauv cov khoom siv FAB
● Kuaj cov qhov (sockets) rau cov khoom siv uas rhiab heev rau hluav taws xob
● Cov cuab yeej siv hauv chav huv uas kev tswj hwm static yog qhov tseem ceeb
Kev Tsim Khoom & Kev Zoo:
Kev ua alumina txheem + ESD kev kho qhov chaw → qhov tsis kam ntawm qhov chaw ntsuas raws li ANSI/ESD STM11.11. Txhua qhov yog 100% sim nrog lub electrode nplhaib concentric.
Cov txiaj ntsig:
● Tiv thaiv kev poob qoob loo uas cuam tshuam nrog ESD
● Tswj tau lub zog ntawm cov khoom siv ceramic thiab kev tiv taus tshuaj lom neeg
● Tsis muaj cov khoom me me los ntawm kev tso tawm hluav taws xob
