Lub nplhaib foob Alumina Ceramic uas muaj purity siab rau kev kaw lub chamber kub siab
St.Cera lub nplhaib foob ceramic yog tsim los ua lwm txoj hauv kev rau polymer O-rings hauv qhov chaw kub heev uas elastomers lwj. Ua los ntawm 99.8% alumina siab-purity (Al₂O₃), lub nplhaib foob ruaj khov no yog siv rau hauv cov ntawv thov sealing static - feem ntau ua ke nrog cov hlau mos lossis graphite gasket - los muab kev tswj hwm lub tshuab nqus tsev lossis roj ntawm qhov kub txog li 800 ° C thiab hauv cov plasma lossis cov chaw tshuaj lom neeg. Cov khoom siv muaj xoom outgassing, lub zog compressive siab (lub zog flexural hauv qab 361 MPa), thiab tshuaj inertness (tiv taus halogens, acids, thiab alkalis tshwj tsis yog HF). Cov chaw sealing precision-lapped (flatness ≤5 μm, surface roughness Ra ≤0.2 μm) ua kom muaj kev sib cuag nrog cov hlau lossis cov khoom ceramic.
Cov Lus Qhia Tshwj Xeeb(raws li 99.8% Al₂O₃):
| Vaj tse | Tus nqi |
| Khoom siv | 99.8% Alumina (Ivory) |
| Qhov Ceev | 3.93 g/cm³ |
| Kev Nqus Dej | 0% |
| Lub zog flexural | 361 MPa |
| Lub Zog Nqus (est.) | >2000 MPa |
| Vickers Hardness | 16 GPa |
| Kev Nthuav Dav Kub (25–1000 ° C) | 7.2 × 10⁻⁶/℃ |
| Kub Tshaj Plaws Ua Haujlwm | 800 ° C (cua), 1600 ° C (inert) |
| Qhov Tiav Ntawm Qhov Chaw (lub ntsej muag kaw) | Ra ≤0.2 μm (lapped) |
| Kev tiaj tiaj (ib 25 hli) | ≤5 μm |
| Tus Nqi Xaus Helium | <1 × 10⁻¹⁰ Pa·m³/s (nrog rau lub gasket tsim nyog) |
Cov ntawv thov:
- · Cov ntsaws ruaj ruaj ntawm cov txheej txheem semiconductor (CVD, PVD, etch)
- · Cov ntsaws ruaj ruaj rau qhov cub kub heev
- · Cov flanges pub los ntawm lub tshuab nqus tsev
- · Kev kaw cov hlab ntsha tshuaj lom neeg
Txheej Txheem Tsim Khoom:
Isostatic nias → sintering ntawm 1600 ° C → precision ob sab lapping kom ua tiav ultra-flat, du sealing ntsej muag → ntug chamfering → ultrasonic ntxuav. Txhua lub nplhaib yog 100% kuaj qhov xau ntawm lub helium leak detector nrog tus qauv hlau gasket.
Kev Tswj Xyuas Zoo:
- Kev kuaj xyuas qhov ntev ntawm CMM (ID, OD, tuab, sib luag)
- · Lub tshuab ntsuas qhov chaw rau Ra thiab waviness
- · Kev ntsuas qhov tiaj tiaj siv optical flat
- Kev kuaj xyuas qhov xau ntawm Helium (txheej txheem rov qab nias)
Cov txiaj ntsig zoo dua Polymer O-rings:
- · Withstands 800 ° C vs. <300 ° C rau FFKM
- · Tsis muaj pa phem tawm - tsis muaj kuab paug rau ib puag ncig nqus tsev
- · Tiv taus txhua yam tshuaj lom neeg hauv plasma (fluorine, chlorine, oxygen)
- · Tsis muaj kev teeb tsa compression lossis deformation mus tas li
- · Lub neej ua haujlwm tsis muaj kev txwv hauv qhov chaw huv si
Cov Kev Txwv (Cov Lus Cim Tseem Ceeb):
- · Tsis yog O-ring— nws yog ib lub nplhaib ceramic uas xav tau lub gasket mos (tooj liab, txhuas, lossis graphite) los kaw.
- · Tsis haum rau kev txav mus los lossis kev sib txawv ntawm flange loj.
- · Tus nqi pib siab dua li polymer O-rings, tab sis lub neej ntev dua txo tus nqi ntawm kev muaj.
- · Txhob yooj yim — tuav nrog kev ceev faj; tsis txhob cuam tshuam rau qhov chaw lossis khoov.
Lus Cim:Cov ntaub ntawv saum toj no ua raws li cov lus qhia txog Al₂O₃ uas tau muab. Tsis muaj cov ntaub ntawv rau cov ntaub ntawv elastomeric tau muab. Cov khoom no yog lub nplhaib foob zoo li qub, tsis yog elastomeric O-ring. Thov paub meej tias qhov no puas ua tau raws li koj cov kev xav tau ntawm daim ntawv thov.
