High-Purity Alumina Chamber Focus Ring rau Plasma Etch & CVD Systems

St.Cera lub nplhaib tsom iav chamber yog ib qho khoom siv tseem ceeb uas siv rau hauv cov khoom siv plasma etch, CVD, thiab PVD semiconductor. Ua los ntawm 99.8% alumina uas muaj purity siab (Al₂O₃), lub nplhaib puag ncig ntug wafer kom txwv plasma thiab ua kom zoo dua qhov kev faib tawm ntawm ion, yog li txhim kho qhov sib xws ntawm etch thoob plaws qhov chaw wafer. Cov khoom siv no muaj kev tiv thaiv plasma zoo heev, lub zog dielectric siab (15 × 10⁶ V / m), thiab kev ruaj khov thermal txog li 1600 ° C, ua kom ntseeg tau tias muaj kev ntseeg siab mus sij hawm ntev hauv cov chaw plasma uas muaj fluorine- lossis chlorine. ID / OD thiab qhov tiaj tiaj (≤10 μm) ua rau muaj qhov chaw ntug wafer raug, txo cov qhov tsis zoo ntawm ntug thiab kev tsim cov khoom me me.

Cov Lus Qhia Tshwj Xeeb(raws li 99.8% Al₂O₃):

Cov ntawv thov:

• · Dielectric etch chamber focus rings (oxide, nitride etch)
• · Silicon etch chamber ntug nplhaib
• · Cov nplhaib ntawm cov txheej txheem CVD chamber
• · PVD chamber shield thiab clamp rings

Txheej Txheem Tsim Khoom:

Cov hmoov alumina purity siab yog isostatically nias → ntsuab machined rau ze-net duab → sintered ntawm 1600 ° C → CNC pob zeb diamond sib tsoo ntawm ID, OD, thiab thickness → lapping kom ua tiav flatness ≤10 μm → ultrasonic ntxuav → 100% CMM tshuaj xyuas. Qhov tiav Ra ​​≤0.4 μm txo cov khoom me me adhesion.

Kev Tswj Xyuas Zoo:

• · 100% kev tshuaj xyuas qhov ntev (ID, OD, tuab, sib luag)
• · Kev kuaj xim nkag mus rau hauv cov xim me me (tsis pub muaj kab nrib pleb)
• · Kev tshuaj xyuas pom hauv qab 20 × lub tshuab kuaj mob - tsis muaj cov chips, voids, lossis xim tsis zoo
• · Kev sim lub zog dielectric raws li ASTM D149 (kev kuaj)

Cov txiaj ntsig zoo dua li Silicon lossis Quartz Focus Rings:

• · 5–10 × lub neej ntev dua hauv cov ntshav fluorocarbon
• Tsis muaj cov khoom siv los ua kom cov wafers tsis huv
• · Lub zog dielectric siab dua tiv thaiv arcing
• · Tswj qhov tiaj tiaj thiab qhov tseeb ntawm qhov ntev dhau ntau txhiab teev RF

Lwm Cov Khoom Siv - Yttria-Stabilized Zirconia (ZrO)₂):

Rau cov ntawv thov uas xav tau kev tawg siab dua (piv txwv li, cov chav uas muaj kev hloov pauv kub ntau zaus lossis kev poob siab ntawm lub cev), ZrO₂ cov nplhaib tsom iav (qhov ceev 6.03 g / cm³, lub zog flexural 1000 MPa, kev tawg tawv 5–8 MPa · m¹ / ²) muaj. Txawm li cas los xij, alumina muab kev siv nyiaj zoo dua thiab yog tus qauv kev lag luam rau feem ntau cov ntawv thov nplhaib tsom iav.

Kev Kho Kom Haum:

• · Cov kauj ruam profiles, counterbores, lossis mounting qhov raws li tus neeg siv khoom kos duab
• · Y₂O₃ txheej rau kev tiv thaiv kev yaig ntawm cov ntshav (tuab 20–100 μm)
• · Siv laser cim rau tus lej ntawm qhov chaw, hnub tim, lossis cov cim sib phim

Lus Cim:Tag nrho cov ntaub ntawv ua raws li cov lus qhia txog Al₂O₃ uas tau muab los. Yog xav paub ntxiv txog ZrO₂ cov lus qhia, mus saib daim ntawv qhia txog zirconia uas tau muab los. Cov qauv tsim lub nplhaib tsom xam yuav xav tau kev pom zoo los ntawm patent - cov neeg siv khoom muaj lub luag haujlwm los txheeb xyuas cov cai ntawm cov cuab yeej cuab tam.