Lub Tshuab Nqus Tsev SiC Uas Muaj Hlau Txhawb Rau Kev Tuav Tes Uas Muaj Qhov Thiab Nyias
St.Cera lub tshuab nqus tsev ua los ntawm cov hlau ua los ntawm cov khoom siv ceramic ua ke ib txheej ceramic silicon carbide (SiC) uas muaj qhov porous nrog lub hauv paus hlau uas ua los ntawm cov hlau uas ua tiav lawm (txhuas lossis hlau tsis xeb). Cov khoom siv SiC uas muaj qhov porous (xiav-dub, porosity 35–40%, qhov pore loj 20–30 μm, permeability 60 ml/cm²·min) muab kev faib tawm ntawm lub tshuab nqus tsev zoo ib yam, maj mam thoob plaws tag nrho cov wafer nto, tshem tawm cov cim ntug thiab ua kom tsis txhob muaj kev sib cuag rau cov wafer nyias (≤100 μm) lossis wafer uas nkhaus. Txheej SiC muaj kev nthuav dav thermal qis (3.5 × 10⁻⁶/℃), kev ruaj khov thermal txog li 1000°C, thiab lub zog flexural nruab nrab (32–35 MPa). Lub hauv paus hlau ntxiv kev ruaj khov ntawm cov qauv, yooj yim mounting ntawm cov qhov threaded, thiab kev tiv thaiv kev tawg brittle. Lub chuck no zoo tagnrho rau kev sib tsoo backside, dicing, thiab kev ua wafer kub siab uas qhov sib xws ntawm lub tshuab nqus tsev thiab thermal sib xws yog qhov tseem ceeb.
Cov Lus Qhia Tshwj Xeeb (raws li cov ntaub ntawv SiC uas muaj qhov nqus tau):
| Vaj tse | Tus nqi |
| Cov Khoom Siv Ua Los Ntawm Av nplaum | Silicon Carbide uas muaj qhov nqus tau (SiC ≥80%) |
| Xim | Xiav-dub |
| Qhov porosity | 35–40% |
| Qhov Loj ntawm Qhov Ncauj | 20–30 μm |
| Qhov Ceev | 2.1–2.3 g/cm³ |
| Kev nkag tau | 60 ml/cm²·min |
| Lub zog flexural | 32–35 MPa |
| Cov Coefficient ntawm Kev Nthuav Dav Kub (25-1000 ° C) | 3.5 × 10⁻⁶/℃ |
| Kub Tshaj Plaws Ua Haujlwm | 1000°C |
| Kev Tiv Thaiv Hluav Taws Xob | 10⁻¹⁰ Ω/cm (ib cov ntaub ntawv muab, feem ntau rau SiC uas muaj qhov ntxeem tau) |
| Cov Khoom Siv Hlau | Txhuas 6061 los yog Stainless Steel 304 (yeem xaiv tau) |
| Hlau Puag Thickness | 10–30 hli (kev cai) |
Lus Cim: Lub zog khoov qis dua li cov SiC ntom ntom vim yog qhov porosity. Cov khoom siv hlau tsis yog los ntawm cov rooj ceramic.
Cov ntawv thov:
- · Kev sib tsoo sab nraub qaum ntawm cov wafers nyias nyias (≤100 μm)
- · Cov wafer mounting rau dicing
- · Kev kub siab ntawm cov wafer chucking (txog li 1000 ° C)
- · Lub tshuab nqus tsev rau cov khoom uas muaj qhov porous lossis cov khoom tawg yooj yim
Kev Tsim Khoom:
Phaj SiC uas muaj qhov nqus dej (ua los ntawm cov pwm uas muaj qhov nqus dej, sintered) → lapped rau qhov tiaj tiaj ≤10 μm → lub hauv paus hlau ua tshuab nrog cov qhov nqus tsev thiab cov yam ntxwv mounting → epoxy bonding lossis mechanical clamping → helium leak test.
Kev Tswj Xyuas Zoo:
- · Qhov porosity thiab qhov loj ntawm qhov pore tau txheeb xyuas los ntawm SEM
- · Kev sim permeability (cua ntws)
- · Kev ntsuas qhov tiaj tiaj nrog laser interferometer
- · Tus nqi xau Helium <1 × 10⁻⁹ Pa·m³/s
Cov txiaj ntsig zoo dua li Grooved lossis Dense Ceramic Chucks:
- · Tsis muaj cim wafer - lub tshuab nqus tsev tsis muaj qhov sib cais
- · Kev ntxuav cov qhov hws - txo qhov txhaws
- · Siv tau rau cov wafers uas nkhaus (txog li 500 μm bow)
- · Lub hauv paus hlau tiv thaiv kev tawg thiab ua kom yooj yim rau kev sib koom ua ke
Cov Kev Txwv:
- · Lub zog khoov qis dua (32–35 MPa) - tsis txhob muaj kev cuam tshuam
- · Qhov kub ua haujlwm txwv rau 1000 ° C (porous SiC), tab sis cov hlau epoxy bond txwv rau ≤200 ° C tshwj tsis yog tias clamped mechanically
- · Tsis yog rau lub tshuab nqus tsev siab (cov qauv porous txwv qhov sib txawv ntawm lub tshuab nqus tsev siab tshaj plaws)
Kev Kho Kom Haum:
- · Lub hauv paus hlau: txhuas (lub teeb), stainless hlau (tiv taus xeb), Invar (kev nthuav dav tsawg)
- · Kev sib txuas: epoxy (≤200 ° C) lossis clamp kho tshuab (txog li 500 ° C)
- · Lub nplhaib kaw ntug rau kev tswj hwm lub tshuab nqus tsev
Thov nco ntsoov: Lub zog khoov (32–35 MPa) uas muab los no qis dua li cov khoom siv ceramic ntom ntom vim muaj qhov porosity. Ua tib zoo tuav kom tsis txhob muaj ntug tawg.
