High-Purity Alumina Ceramic End Effector rau Wafer Handling Robots
St.Cera lub alumina ceramic end effector yog ua los ntawm 99.8% Al₂O₃ uas muaj purity siab siv cov khoom siv sib tsoo CNC 5-axis siab heev. Peb cov peev xwm tsim khoom suav nrog cov tshuab sib tsoo precision thiab CNC machining centers, ua rau cov geometries nyuaj nrog kev ua haujlwm siab. Lub end effector muaj cov profile nyias (nyias li 1.5 hli) nrog ntug tapered rau kev ntxig wafer du. Cov khoom siv muab kev ruaj khov siab (Young's modulus 380 GPa), kev tiv thaiv kev hnav zoo heev, thiab kev ruaj khov thermal txog li 800 ° C. Txhua chav tsev yog precision grounded kom ua tiav qhov tiaj tus ntawm 0.003 hli, parallelism ntawm 0.002 hli, thiab qhov tiav ntawm Ra0.1, ua kom ntseeg tau tias kev sib cuag wafer sib xws thiab kev ua haujlwm tsis muaj khoom me me hauv semiconductor FAB ib puag ncig. Muaj qhov ntev ntawm 150 hli txog 450 hli, nrog cov geometries taub hau (edge grip, Bernoulli, tiaj tus) thiab mounting flanges kom haum rau OEM robots. Cov kev xaiv tiav ntawm qhov chaw suav nrog lapped, polished, lossis ESD dissipative coating (10⁶–10⁹ Ω/sq).
Cov Lus Qhia Tshwj Xeeb (raws li 99.8% Al₂O₃& St.Cera muaj peev xwm tsim khoom):
| Vaj tse | Tus nqi |
| Khoom siv | 99.8% Alumina (Ivory) |
| Qhov Ceev | 3.93 g/cm³ |
| Lub zog flexural | 361 MPa |
| Vickers Hardness | 16 GPa |
| Young's Modulus | 380 GPa |
| Kev tiaj tiaj | 0.003 hli |
| Kev sib luag | 0.002 hli |
| Qhov Chaw Tiav | Ra0.1 (lapped/polished) |
| Max Kev Ua Haujlwm Temp | 800°C |
| Qhov Ntev Ntau | 150–450 hli |
Cov ntawv thov:
- · Kev hloov pauv wafer hauv lub tshuab nqus tsev thiab cov neeg hlau hauv huab cua
- · Cov khoom siv ua haujlwm kawg FAB rau 200mm/300mm wafers
- · Kev tuav cov wafer nyias nyias (nrog kev xaiv ESD)
Kev Muaj Peev Xwm Tsim Khoom:
Peb cov tshuab sib tsoo precision thiab CNC machining chaw ua rau muaj peev xwm tsim cov khoom siv ceramic nyuaj nrog:
- · Qhov ntev tshaj plaws ntawm kev ua haujlwm: 1500mm
- · Qhov siab tshaj plaws sab nraud: 600 hli
- Yam tsawg kawg nkaus sab hauv txoj kab uas hla: 0.2 hli
- · Qhov tuab tshaj plaws: 100 hli
Kev Tswj Xyuas Zoo:
Kev Ncaj Ncees 0.005mm, perpendicularity 0.005mm, puag ncig 0.002mm, parallelism 0.002mm, concentricity 0.01mm tau txheeb xyuas los ntawm CMM. Txhua chav tsev yog ultrasonically ntxuav thiab Class 100 cleanroom ntim.
