Alumina Nqus Tsev Chuck rau Precision Dicing & Grinding
St.Cera lub tshuab nqus tsev alumina chuck yog tsim los ntawm 99.8% siab-purity Al₂O₃ nrog cov qhov nqus tsev precision-machined. Peb lub peev xwm sib tsoo precision ua tiav qhov tiaj tus ntawm 0.003mm thiab parallelism ntawm 0.002mm, ua kom ntseeg tau tias wafer fixation tsis muaj warp thaum dicing, backside sib tsoo, thiab kev tshuaj xyuas. Cov khoom siv muaj lub zog flexural siab (361 MPa), hardness (16 GPa), thiab thermal stability txog li 800 ° C. Muaj nyob rau hauv cov qauv puag ncig txog li 600mm sab nraud txoj kab uas hla (OD) thiab cov duab plaub fab txog li 1500 hli ntev. Cov qhov nqus tsev yog tsim tshwj xeeb (concentric, radial, lossis grid qauv) kom haum rau cov txheej txheem tshwj xeeb. Txhua lub chuck raug tshuaj xyuas nrog laser interferometer thiab muab nrog daim ntawv qhia txog kev txheeb xyuas qhov tiaj tus.
Cov Lus Qhia Tshwj Xeeb (raws li 99.8% Al₂O₃& St.Cera muaj peev xwm tsim khoom):
| Vaj tse | Tus nqi |
| Khoom siv | 99.8% Alumina (Ivory) |
| Qhov Ceev | 3.93 g/cm³ |
| Lub zog flexural | 361 MPa |
| Vickers Hardness | 16 GPa |
| Txoj kab uas hla sab nraud (max) | 600 hli |
| Tuab (siab tshaj) | 100 hli |
| Ntev (siab tshaj plaws) | 1500 hli |
| Kev tiaj tiaj | 0.003 hli |
| Kev sib luag | 0.002 hli |
| Qhov Chaw Tiav | Ra0.1 |
| Max Kev Ua Haujlwm Temp | 800°C |
Cov ntawv thov:
- · Kev txiav thiab sau cov wafer (200mm/300mm thiab loj dua)
- · Kev sib tsoo sab nraub qaum ntawm cov wafers nyias nyias
- · Kev tshuaj xyuas thiab kev soj ntsuam qhov muag
- · Kev tuav cov khoom loj
Kev Tsim Khoom Tseeb:
- · Ncaj nraim: 0.005 hli
- · Kev sib tshuam: 0.005 hli
- · Qhov Puag Ncig: 0.002 hli
- · Kev sib sau ua ke: 0.01 hli
