Lub Tshuab Nqus Tsev Uas Siv Alumina - Rigidity Siab Rau Kev Ua Haujlwm Kom Tseeb
Lub tshuab nqus tsev chuck uas ua los ntawm alumina no yog tsim los ntawm 99.8% Al₂O₃, muab qhov chaw du thiab tsis muaj qhov porous nrog cov qauv nqus tsev groove. Nws muab kev ruaj khov tshwj xeeb (Young's modulus 380 GPa) thiab qhov tiaj tiaj (≤3 μm), ua rau nws zoo tagnrho rau kev sib tsoo, lapping, thiab dicing ntawm semiconductor wafers thiab cov khoom siv optical. Cov khoom siv thermal conductivity siab (32 W/m·k) ua kom muaj qhov kub sib xws thaum lub sijhawm ua.
Cov Lus Qhia Tshwj Xeeb(raws li 99.8% Al₂O₃):
| Vaj tse | Tus nqi |
| Khoom siv | 99.8% Alumina (Ivory) |
| Qhov Ceev | 3.93 g/cm³ |
| Lub zog flexural | 361 MPa |
| Vickers Hardness | 16 GPa |
| Young's Modulus | 380 GPa |
| Kev Ua Kub | 32 W/m·k |
| Kev tiaj tiaj | ≤3 μm (tshaj 200 hli) |
| Qhov Roughness ntawm qhov chaw (sab chuck) | Ra ≤0.4 μm |
| Max Kev Ua Haujlwm Temp | 800°C |
Cov ntawv thov:
- · Wafer backside sib tsoo (ntxhib thiab zoo)
- · Kev txiav cov khoom tawg yooj yim kom raug
- · Kev sib tsoo ntawm cov khoom siv ceramic
- · Kev txhuam cov lens optical
Kev Tsim Khoom:
Kev sib tsoo ntawm ob sab → pob zeb diamond grooving (yeem xaiv tau) → ntug puag ncig → kev ntxuav ultrasonic → kev tshuaj xyuas 100% flatness nrog laser interferometer.
Aqhov zoo:
- · Kev txhawb nqa ruaj khov txo qhov kev hloov pauv thaum muaj kev thauj khoom
- · Tsis muaj cov khoom me me los ntawm cov qauv porous
- · Yooj yim ntxuav (siv tau nrog cov tshuaj yaj)
- · Cov qhov nqus tsev uas tuaj yeem hloov kho tau (concentric, radial, cov qauv tshwj xeeb)
Muaj Qhov Loj:
Puag ncig: 100mm, 150mm, 200mm, 300mm; square/rectangular raws li qhov kev thov.
Peb kuj muab cov qauv ua los ntawm hlau rau lub zog kho tshuab siab dua.
