Alumina-Based Porous Ceramic Vacuum Chuck rau Kev Tswj Xyuas Wafer Nyias
St.Cera lub alumina-based porous chuck yog ua los ntawm 99.6% high-purity Al₂O₃ nrog kev tswj hwm qhov qhib porosity ntawm 30–45% thiab qhov loj ntawm cov pore sib xws ntawm 10 txog 50 μm. Tsis zoo li grooved chucks, qhov chaw porous muab lub tshuab nqus tsev faib thoob plaws tag nrho wafer backside, tshem tawm cov cim ntug thiab ua rau maj mam tuav cov ultra-thin (≤100 μm) lossis warped wafers. Cov khoom siv muab lub zog flexural ≥250 MPa thiab thermal stability txog li 400 ° C hauv huab cua.
Cov Lus Qhia Tshwj Xeeb(raws li 99.6% Al₂O₃):
| Vaj tse | Tus nqi |
| Khoom siv | 99.6% Alumina (Dawb) |
| Qhov porosity | 30–45% (kho tau) |
| Qhov Loj Nruab Nrab ntawm Qhov Ncauj | 10–50 μm |
| Lub zog flexural | ≥250 MPa |
| Qhov Ceev | 3.88 g/cm³ |
| Kev tiaj tiaj (ntau tshaj 200 hli) | ≤5 μm |
| Max Kev Ua Haujlwm Temp | 400°C (cua) |
| Qhov Chaw Tiav | Lapped (Ra ≤0.8 μm) |
Cov ntawv thov:
- · Cov wafer nyias nyias (≤50 μm) sib tsoo sab nraub qaum
- · Cov wafer mounting rau dicing
- · Kev khaws cov pwm ib leeg
- · Kev tuav cov khoom siv iav
Kev Tsim Khoom:
Hmoov sib xyaw nrog cov pore formers → isostatic pressing → sintering ntawm 1600 ° C → lapping mus rau qhov tuab kawg. Txhua lub chuck raug kuaj xyuas kom paub tseeb tias lub tshuab nqus tsev sib npaug (kev hloov pauv siab <5%) thiab kuaj xyuas qhov loj me ntawm qhov pore (SEM).
Cov txiaj ntsig zoo dua li cov chucks ib txwm muaj:
- · Tsis muaj cim wafer backside lossis pwm hloov pauv
- · Tuav cov wafers nrog lub hneev txog li 500 μm
- · Qhov chaw ntxuav nws tus kheej (qhov hws tiv taus kev txhaws)
- · Kev txhawb nqa sib xws tshem tawm kev ntxhov siab hauv zos
Ckev hloov kho kom haum:
Cov duab puag ncig los yog plaub fab, txoj kab uas hla 100–450 hli. Muaj lub nplhaib kaw ntug rau kev tswj lub tshuab nqus tsev uas faib ua zoned.
Thov ib qho qauv rau koj qhov loj me ntawm wafer.
