12-Nti Alumina Nqus Tsev Chuck rau 300mm Wafer Ua Haujlwm
St.Cera lub tshuab nqus tsev chuck loj 12 nti yog ua los ntawm 99.8% alumina uas muaj purity siab (Al₂O₃) rau kev siv wafer 300 hli. Lub chuck muaj qhov chaw zoo nkauj (qhov dav ntawm qhov grooved yog 0.5–1.0 hli, qhov pitch yog 2–3 hli) kom ntseeg tau tias muaj kev faib tawm ntawm lub tshuab nqus tsev thoob plaws 300 hli txoj kab uas hla. Qhov tiaj tiaj yog tswj tau hauv 5 μm, ua rau lub wafer tsis muaj warp thaum lub sijhawm dicing, sib tsoo sab nraub qaum, thiab tshuaj xyuas. Lub zog flexural siab (361 MPa) thiab qhov nyuaj (16 GPa) lav qhov ruaj khov ntev txawm tias nyob hauv lub voj voog nqus tsev rov ua dua.
Cov Lus Qhia Tshwj Xeeb (raws li 99.8% Al₂O₃):
| Vaj tse | Tus nqi |
| Txoj kab uas hla | 300 hli (12 nti) |
| Khoom siv | 99.8% Alumina (Ivory) |
| Qhov Ceev | 3.93 g/cm³ |
| Lub zog flexural | 361 MPa |
| Vickers Hardness | 16 GPa |
| Kev tiaj tiaj (ntau tshaj 300 hli) | ≤5 μm |
| Qhov Dav Dav | 0.5–1.0 hli |
| Max Kev Ua Haujlwm Temp | 800°C |
| Lub zog dielectric | 15 × 10⁶ V/m |
Cov ntawv thov:
Kev txiav thiab sau ntawv wafer 300 hli
Wafer backside sib tsoo (kev txhawb nqa wafer nyias)
Kev tshuaj xyuas thiab kev soj ntsuam qhov muag
Kev sib txuas ib ntus / kev tshem tawm cov chucks
Kev Tsim Khoom:
CNC zom thiab lapped kom txog thaum kawg tiaj tus, grooved nrog pob zeb diamond log, ultrasonically ntxuav, thiab ntim rau hauv Chav Kawm 100 chav huv. Txhua lub chuck raug tshuaj xyuas 100% rau qhov tiaj tus (laser interferometer) thiab qhov tob ntawm qhov groove (profilometer).
Cov txiaj ntsig:
Tsawg tsawg cov khoom me me (≤0.05 cov khoom me me / cm²)
Chemically inert rau cov kuab tshuaj thiab cov kua qaub
Qhov chaw tiv thaiv ESD (resistivity > 10¹³ Ω·cm)
Cov qauv qhov nqus tsev thiab cov qhov rooj tom qab muaj.
