Silicon Carbide (SiC) Ceramic End Effector - Kev Nyuaj Siab Rau Kev Tswj Xyuas Wafer Kub Siab
St.Cera's SiC ceramic end effector yog tsim los ntawm cov khoom siv silicon carbide siab (SiC cov ntsiab lus 99.72%, Si dawb 0.05%) siv cov khoom siv S1111. Nws muaj cov khoom siv kho tshuab zoo heev: lub zog flexural 449 MPa (ntsuas), elastic modulus 457 GPa (ntsuas), thiab Vickers hardness 25–28 GPa (feem ntau). Qhov ceev qis (3.10–3.15 g/cm³, feem ntau) muab qhov ruaj khov tshwj xeeb, zoo tagnrho rau cov neeg hlau hloov wafer ceev ceev. Nrog rau kev ua kom sov ntawm 120–150 W/m·K (feem ntau) thiab coefficient thermal expansion ntawm 4.0–4.5 × 10⁻⁶/℃ (feem ntau), qhov kawg effector no ua kom sov thiab tswj tau qhov ruaj khov thaum lub sijhawm ua haujlwm kub siab (txog li 1600–1700 ° C, tsis muaj kev thauj khoom). Xim dub/grey thiab xoom dej nqus tau ua kom chav huv si sib xws.
Cov Lus Qhia Tshwj Xeeb(raws li daim ntawv qhia txog kev xeem SiC S1111 & cov nqi ib txwm muaj):
| Vaj tse | Tus nqi |
| Khoom siv | SiC (99.72% SiC, 0.05% Si Dawb) |
| Xim | Dub/Grey |
| Qhov Ceev | 3.10–3.15 g/cm³ |
| Kev Nqus Dej | 0% |
| Lub zog flexural | 449 MPa (qhov nruab nrab) |
| Kev tawg tawv | 3.12 MPa·m¹/² (qhov nruab nrab) |
| Modulus Elastic | 457 GPa |
| Vickers Hardness | 25–28 GPa |
| Kev Ua Kub (25 ° C) | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5 × 10⁻⁶/℃ |
| Max Siv Kub (tsis muaj load) | 1600–1700°C |
Cov ntawv thov:
● Kev siv cov wafer kub siab (post-anneal, RTP, epitaxy)
● Cov chav ua kom cov plasma etch xav tau kev tiv thaiv kev yaig siab
● Cov neeg hlau hloov pauv ceev ceev (sib dua, ruaj khov heev)
Kev Tsim Khoom:
SiC hmoov sintering → precision CNC sib tsoo ntawm caj npab profile thiab mounting nta → nto lapping → ultrasonic ntxuav. 100% kev tshuaj xyuas qhov ntev thiab helium xau kuaj rau cov ntawv thov nqus tsev.
Kev Tswj Xyuas Zoo:
● Kev tshuaj xyuas CMM ntawm qhov ntev, dav, thiab qhov tiaj tiaj
● Kev sim zog flexural ib pawg (ib daim ntawv qhia txog kev xeem tus qauv)
● Kev kuaj xyuas hauv qab lub tshuab microscope kom paub txog qhov tsis zoo ntawm qhov chaw
Cov txiaj ntsig zoo dua Alumina lossis Hlau:
● 2 × siab dua elastic modulus (457 vs ~380 GPa rau alumina) - tsawg dua deflection
● 3 × kev ua kom sov siab dua - cua sov sai dua
● Tiv taus >1600°C piv rau alumina's 800°C hauv huab cua
● Qhov ceev qis dua li hlau - txo qhov hnyav 40%
Kev Kho Kom Haum:
Qhov ntev 150–450 hli, cov duab ntawm lub hau (qhov tuav ntug, Bernoulli, tiaj tus), cov qauv flange mounting raws li OEM daim duab kos.
*Txhua cov ntaub ntawv kho tshuab saum toj no yog los ntawm daim ntawv qhia kev xeem uas tau muab (batch S1111). Cov nqi thermal thiab hardness yog cov yam ntxwv rau qib SiC no; thov hu rau peb kom tau daim ntawv pov thawj tshwj xeeb.*
