Porous Ceramic Nqus Tsev Chuck rau Warped Wafer Tuav
St.Cera lub porous ceramic chuck yog tsim los ntawm high-purity alumina nrog qhov qhib porosity sib xws ntawm 30–45% thiab qhov loj ntawm pore txij li 10 txog 100 μm. Tsis zoo li cov grooved chucks ib txwm muaj, qhov chaw porous muab lub tshuab nqus tsev faib thoob plaws tag nrho sab nraub qaum ntawm wafer, tuav tau zoo cov wafers warped, nyias, lossis ib leeg yam tsis muaj ntug nqa tawm lossis tawg. Lub tshuab nqus tsev maj mam (hloov kho tau ntawm restrictor) kuj tiv thaiv kev cim sab nraub qaum.
Cov Lus Qhia Tshwj Xeeb(raws li 99.6% Al₂O₃):
| Vaj tse | Tus nqi |
| Qhov porosity | 30–45% |
| Qhov Loj Nruab Nrab ntawm Qhov Ncauj | 10–100 μm (xaiv tau) |
| Lub zog flexural | ≥250 MPa |
| Kev tiaj tiaj (ntau tshaj 300 hli) | ≤5 μm |
| Qhov Chaw Tiav | Lapped (Ra 0.8 μm) |
| Qib Siab Tshaj Plaws ntawm Lub Tshuab Nqus Tsev | -80 kPa |
| Kev Ua Haujlwm Kub | 400 ° C (cua), 600 ° C (inert) |
| Khoom siv | 99.6% Al₂O₃, ZrO₂, lossis SiC |
Cov ntawv thov:
Cov wafer nyias nyias (≤50 μm) sib tsoo sab nraub qaum
Kev teeb tsa wafer rau kev txiav
Kev txiav tawm ntawm daim kab xev
Kev tuav vaj huam sib luag iav
Kev Tsim Khoom & Kev Zoo:
Cov hmoov av ua los ntawm cov av nplaum sib xyaw nrog cov organic pore formers → nias → sintered → lapped kom txog thaum kawg tuab. Txhua lub chuck raug kuaj xyuas kom paub tseeb tias qhov sib npaug ntawm lub tshuab nqus tsev (≤5% deviation) thiab kuaj xyuas qhov faib tawm ntawm qhov loj me (SEM). Kev ntsuas qhov tiaj tiaj nrog laser interferometer.
Cov txiaj ntsig zoo dua li Grooved Chucks:
Tsis muaj cim ntug wafer lossis hloov pauv tuag
Tuav cov wafers uas nkhaus (txog li 500 μm bow)
Tshem tawm qhov chaw nqus tsev clogging
Kev txhawb nqa tus kheej rau cov substrates nyias
Kev Kho Kom Haum:
Cov duab puag ncig los yog duab plaub fab, loj txog li 600 hli. Peb tuaj yeem siv cov nplhaib kaw ntug lossis cov chaw faib thaj chaw uas muaj qhov nqus tsev. Cov qauv uas muaj hlau txhawb nqa muaj rau cov kev xav tau kev ruaj khov siab.
Thov ib qho qauv rau koj qhov loj me ntawm wafer thiab kev sim warpage.
